A protective surface film, ProFilm™ DX112A helps ensure consistent, precise and repeatable wafer production yields through the use of superior coating technology. ProFilm™ DX112A offers Total Thickness Variation (TTV) control, expandable base film and a special low-extractable release liner to significantly reduce silicon residue.
Construction
ProFilm™ DX112A is constructed in three layers:
Configurations
ProFilm™ DX112A is available in a variety of configurations. Standard widths include 200mm, 230mm, 250mm, 275mm, 300mm, 330mm and 400mm. Rolls are provided in splice-free lengths of 100m on a 3” I.D. plastic core. Both custom widths and lengths may be available by special request. ProFilm™ DX112A rolls are polybag wrapped and individually boxed.
Shelf Life and Storage
ProFilm™ DX112A should be stored in a climate controlled environment where conditions do not exceed 25°C (75°F). If stored as recommended, the product will yield a shelf life of 6 months from the date of manufacture found on the core label.
ProFilm™ DX112A Material Properties
The values presented for this product are typical laboratory data and may be changed without notice.
Property | Typical Value | Test Method / Standard |
Adhesive Strength 1 | 1000g before UV 30g after UV |
ASM D 1000 |
Tensile Strength | 19.3 N/mm1 MD 22.0 N/mm1 MD |
ASTM D 882 |
Elongation | >175% MD >350% TD |
ASTM D 882 |
Thickness w/o Release Liner | 112.5μ (4.5 mils) | ASTM D 1005 |
Temperature Resistance | >5 min. @ 40-45°C | – |
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