ProFilm™ DX266C, a protective surface film, is designed to ensure consistent, precise and repeatable wafer production yields. Enhanced by superior coating technology, ProFilm™ DX266C delivers Total Thickness Variation (TTV) control, expandable base film and a special low-extractable release liner to significantly reduce silicon residue.
Construction
ProFilm™ DX266C is constructed in three layers:
Configurations
ProFilm™ DX266C is available in a variety of configurations. Standard widths include 200mm, 230mm, 250mm, 275mm, 300mm, 330mm and 400mm. Rolls are 100mm in length, splice-free, and wound on a 3” I.D. plastic core. Both custom widths and lengths may be available by special request. ProFilm™ DX266C rolls are polybag wrapped and individually boxed.
Shelf Life and Storage
ProFilm™ DX266C should be stored in a climate controlled environment where conditions do not exceed 25°C (75°F). If stored as recommended, the product will yield a shelf life of 6 months from the date of manufacture found on the
ProFilm DX266C Material Properties
1 Bond Test on Stainless Steel Wafer at 180° peel angle and 300mm/min peel and stretching speed. The values presented for this product are typical laboratory data and may be changed without notice.
Property | Typical Value | Test Method / Standard |
Adhesive Strength | 525g/25mm | ASM D 1000 |
Tensile Strength | 24 N/mm MD 20 N/mm TD |
ASTM D 882 |
Elongation | >400% MD >400% TD |
ASTM D 882 |
Thickness w/o Release Liner | 267μ (10.5 mils) | ASTM D 1005 |
Temperature Resistance | >5 min. @ 50-55°C | – |
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