A protective surface film, ProFilm™ DX112A helps ensure consistent, precise and repeatable wafer production yields through the use of superior coating technology. ProFilm™ DX112A offers Total Thickness Variation (TTV) control, expandable base film and a special low-extractable release liner to significantly reduce silicon residue.
ProFilm™ DX112A is constructed in three layers:
ProFilm™ DX112A is available in a variety of configurations. Standard widths include 200mm, 230mm, 250mm, 275mm, 300mm, 330mm and 400mm. Rolls are provided in splice-free lengths of 100m on a 3” I.D. plastic core. Both custom widths and lengths may be available by special request. ProFilm™ DX112A rolls are polybag wrapped and individually boxed.
Shelf Life and Storage
ProFilm™ DX112A should be stored in a climate controlled environment where conditions do not exceed 25°C (75°F). If stored as recommended, the product will yield a shelf life of 6 months from the date of manufacture found on the core label.
ProFilm™ DX112A Material Properties
The values presented for this product are typical laboratory data and may be changed without notice.
|Property||Typical Value||Test Method / Standard|
|Adhesive Strength 1||1000g before UV
30g after UV
|ASM D 1000|
|Tensile Strength||19.3 N/mm1 MD
22.0 N/mm1 MD
|ASTM D 882|
|ASTM D 882|
|Thickness w/o Release Liner||112.5μ (4.5 mils)||ASTM D 1005|
|Temperature Resistance||>5 min. @ 40-45°C||–|